Large-Format Pedestal for Modular Track Systems

Overview

Tool Platform: PRO Z track system

Solution: Expansive, open-frame modular pedestal

Primary Benefit: System-wide rigidity with maximum access and configurability

Application: Photoresist coating and development processes

Customer & Application

Fulcrum engineered a custom machine base pedestal for a leading semiconductor equipment manufacturer utilizing large-format coater/developer track systems developed by Tokyo Electron. The pedestal was designed to serve as a configurable backbone for linear, multi-module track architectures, delivering stability, access, and scalability in high-throughput fab environments.

Challenge: Supporting Large, Linear Track Configurations

The PRO Z track system requires a machine base capable of supporting numerous coater, developer, and ancillary process modules arranged in a linear configuration. The pedestal needed to provide consistent rigidity across an extended footprint while allowing full access for facility connections, maintenance, and future reconfiguration. Any loss of stiffness or alignment across the platform could impact process consistency and throughput.

Fulcrum’s Engineered Solution

Fulcrum developed an expansive, open-frame machine base engineered to function as the structural backbone of the PRO Z track system. The robust frame delivers system-wide rigidity and levelness across the full length of the tool, supporting multiple process modules without compromise. The open design provides unparalleled access for routing facility connections and performing maintenance, while enabling flexible configuration to meet evolving production requirements.