This open-frame machine base is designed for the modularity and accessibility required by a Tokyo Electron (TEL) PRO Coater/Developer track system. The strong, welded frame provides a rigid, level platform for multiple process modules while allowing for easy routing of plumbing, exhaust, and electrical utilities from below. The top plates are marked for precise placement and secure mounting of the track components.

TEL PRO AP

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KLA WS2+

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TEL PRO Z 2C