This robust, cube-like machine base provides a compact and exceptionally rigid foundation for ASML's 500 and 600 series metrology and inspection systems. The design is optimized for both stability and system accessibility, featuring reinforced side walls with integrated access panels. The precision-machined top plate includes specific apertures and mounting patterns engineered for the seamless integration of the system's sensitive optical columns and wafer handling components, ensuring maximum operational stability within a minimal footprint.