Compact Pedestal for Metrology & Inspection Systems

Overview

Tool Platform: 500 and 600 series metrology and inspection systems

Solution: Compact, cube-style precision pedestal

Primary Benefit: Exceptional rigidity and operational stability in a minimal footprint

Application: Semiconductor metrology and inspection environments

Customer & Application

Fulcrum engineered a custom machine base pedestal for a leading semiconductor equipment manufacturer, supporting advanced metrology and inspection platforms developed by ASML. The pedestal was designed to deliver a highly stable, space-efficient foundation for sensitive optical and wafer handling systems while maintaining accessibility for service and integration within fab environments.

Challenge: Stability and Access in a Compact Footprint

The 500 and 600 series metrology systems required a machine base that could deliver exceptional stiffness and vibration control without increasing the overall tool footprint. In addition to structural performance, the pedestal needed to support routine access to internal components for service and integration. Any compromise in rigidity or alignment could negatively impact measurement accuracy and tool reliability.

Fulcrum’s Engineered Solution

Fulcrum developed a robust, cube-like pedestal engineered for maximum rigidity within a compact footprint. Reinforced side walls provide structural stiffness, while integrated access panels enable efficient serviceability. The precision-machined top plate features carefully planned apertures and mounting patterns that seamlessly integrate sensitive optical columns and wafer-handling components. This combination of structural strength and thoughtful accessibility ensures long-term operational stability without sacrificing usability.