Modular Pedestal for Wafer Inspection & Metrology

Overview

Tool Platform: WS2+

Solution: Two-part, modular precision pedestal

Primary Benefit: Vibration damping and stability in a compact footprint

Application: Wafer-level inspection and metrology

Customer & Application

Fulcrum engineered a custom machine base pedestal for a leading semiconductor equipment manufacturer, using advanced wafer inspection and metrology platforms developed by KLA. The pedestal was designed to provide a stable, space-efficient foundation for sensitive measurement systems where vibration control, alignment accuracy, and modular integration are critical to tool performance.

Challenge: Stability for Sensitive Wafer-Level Measurements

The WS2+ system requires a rigid, vibration-damped foundation to support high-precision wafer-level measurements. The machine base needed to deliver this stability within a compact footprint while also accommodating multiple tool components with secure, repeatable interfaces. Any vibration or misalignment could directly impact inspection accuracy and measurement consistency.

Fulcrum’s Engineered Solution

Fulcrum developed a two-part, modular machine base engineered to balance compact design with robust structural performance. The solid, reinforced construction provides effective vibration damping, creating a stable environment for sensitive metrology operations. The modular layout allows individual WS2+ tool components to be securely integrated and aligned, supporting both performance requirements and installation flexibility.